Surface MEMS Micromaching
RF MEMS: AlN & Polysilicon
Slicon Device Technology
3D Photonic Lattice
MEMS devices are created with processing tools and infrastructure very similar to that used to fabricate conventional integrated circuits. Our advanced MEMS and integrated MEMS (IMEMS) are created in the Silicon Fab (SiFab), part of the Microsystems Engineering Sciences and Applications (MESA) Complex, located at Sandia National Laboratories. The SiFab is a world-class fabrication facility dedicated to providing development and engineering capabilities to support industry, government, and other programs of national interest.
Microsystems Engineering Sciences and Applications (MESA) Complex
The SiFab has over 30,000 square feet of clean room space and state-of-the-art equipment for
processing wafers up to 6 inches in diameter. The laboratory was designed and constructed
around 22 separate laminar flow clean room bays, each with an independent air supply. The
multiple clean room bays collectively provide over 12,000 square feet of Class 1 clean
room space (less than 1 particle 0.5 micron or larger per cubic foot of air).
The modular layout allows a great deal of flexibility in the types of projects that can be
performed in the fab. For example, it is possible to perform experimental work in one bay
without affecting well-controlled processes in another. The flexible layout also allows the
SiFab engineers to work efficiently on many projects that require some degree of isolation,
such as benchmarking of advanced process tools, development of state-of-the-art micromachining
techniques, and research into materials science and surface chemistries for advanced
silicon technology development.
The SiFab's professional staff includes a core of Ph.D. and Master's level engineers and
scientists experienced in a broad range of disciplines including microelectronic and
micromachining process development, equipment design, materials engineering, device physics,
chemical engineering, sensor science, circuit design, computer science, failure analysis,
reliability physics, and industrial hygiene.