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Capabilities: Focus Areas and Enabling Technologies

Sandia is a world leader in the technology required for development, fabrication, and production of microelectronic, photonic, micromachine and microsensor devices and products.

Sandia also has the ability to integrate these devices into complete microsystems. Microsystems that sense, think, act, communicate and self-power will make our nation more secure, revolutionize our industries, and will make the revolution in biology a reality

Distinguishing strengths include materials growth and development, device and product design, fabrication technologies for silicon and compound semiconductor devices, advanced packaging technologies, reliability, failure analysis and product delivery for extreme environments.

DOE and Sandia has completed a significant expansion of these capabilities with the Microsystems Engineering Sciences and Applications (MESA) Complex to provide the ability to seamlessly integrate advanced simulation with agile manufacturing to provide a faster, better, cheaper process for providing novel microsystems to support the enduring nuclear weapons stockpile and other critical needs of the nation.

Focus Areas

Micro-Electro-Mechanical Systems µElectroMechanical

Inertial Sensors, Non-inertial Sensors, Actuators, Switches, Relays, ...

BioMEMS / Microfluidics BioMEMS / µFluidics

Sensing anything, anytime, anywhere at multiple scales


Resonators, Oscillators, Filters, Switches,...

Micro OpticsMicroOptics

MEMS Optical Microphone, Nano-Grating Based Low-G Inertial Sensor

Enabling Technologies

MEMS Design Design

MEMS Layout and Design Tools, Facilities, MEMS Shortcourses, ...

MEMS Fabrication Technologies Process Integration & Fabrication

SUMMiT V™, Facilities, SwIFT™, Passive Waveguide, Si AlN for RF MEMS, Bulk Micromachining, Molded Tungsten, 3D Photonic Lattice...

MEMS Measurement, Characterization, and Reliability Assessment Reliability, Testing & Characterization

Reliability Testing, MEMS Measurement Tools and Methods, Operational Characterization, Services...

MEMS Packaging Integration & Packaging

MEMS Advanced Packaging, Facilities, ...


Contact MEMS at Sandia: memsinfo@sandia.gov

MEMS Image Gallery

MEMS Bibliography
MEMS Bibliography

Design Manual …
DRC Error Descriptions
Design Review Checklist

MEMS Bibliography
MEMS Brochure