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Linear Rack and Drive Mechanism
The comb drives (top and right) rotate the main drive gear, which is meshed with a linear rack. This mechanism converts rotational motion into linear motion to perform work.
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Linear Rack Close-up
Close-up of linear rack, rack guides, drive gear, and drive linkage. |
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Drive Gear
A close-up of the drive gear, linear rack and guide. |
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Drive Gear Interaction
The meshed gear teeth of the drive gear and the linear rack. |
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Rack Height
This view was captured at an angle to show the relative height of the device over the plane of the wafer. |
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Rack Structure
This close-up SEM allows us to see the 3D structure of the linear rack. |
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Teeth in Detail
Here is a close-up of the teeth on the linear rack. |
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Double-sided Rack
A two-sided rack that is propelled by a transmission and drives a mirror up, out of plane. |
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Single-sided Rack
The gear driving this single-sided linear rack is positioned at approximately a 45 degree angle to the rack. |
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Rack Close-up
A close-up view of the single-sided linear rack. |
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Rack Structure
This image, taken at an angle, shows the multi-layered structure of a linear rack. |
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Contact MEMS at Sandia: memsinfo@sandia.gov
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