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Silicon Mirror and Drive System
A mirror system design; in this system the mirror is elevated by a three-gear torque-multiplying system. The mirror is shown in the upright position.
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Silicon Mirror Assembly Close-up
Close-up view of previous device; detail of rails and hinges is visible.
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Polysilicon Mirror Assembly Close-up
A fixed-end view of the elevated mirror and the drive assembly.
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Hinged Polysilicon Mirror and Drive Motors
Polysilicon layers fabricated to "fold" on hinges as motors drive linear racks, thereby tilting the flat mirror structure out of plane. |
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Polysilicon Mirror Hinge Close-up
High-magnification view of one of the hinges on our mirrors.
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Pop-up Polysilicon Mirror
Aerial view of a pop-up mirror.
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Transmission, Rack, and Polysilicon Mirror
The transmission and linear rack elevate the mirror located in the lower-right of the frame.
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Pop-up Polysilicon Mirror
This image of a pop-up mirror, taken at an angle, includes the Sandia National Laboratories Thunderbird Logo and the hinges on the linear rack.
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Polysilicon Mirror Hinge
Please note the complex design of the hinge. This device is batch fabricated, with no assembly required.
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Contact MEMS at Sandia: memsinfo@sandia.gov
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