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MicroElectroMechanical Systems (MEMS)

Welcome to the Silicon-Based MEMS site at Sandia National Laboratories.

Sandia is a world leader in the technology required for development, fabrication, and production of microelectronic, photonic, micromachine and microsensor devices and products.

Sandia also has the ability to integrate these devices into complete microsystems. Microsystems that sense, think, act, communicate and self-power will make our nation more secure, revolutionize our industries, and will make the revolution in biology a reality.

Distinguishing strengths include materials growth and development, device and product design, fabrication technologies for silicon and compound semiconductor devices, advanced packaging technologies, reliability, failure analysis and product delivery for extreme environments.

Focus Areas

Micro-Electro-Mechanical Systems µElectroMechanical

Inertial Sensors, Non-inertial Sensors, Actuators, Switches, Relays, ...

BioMEMS / Microfluidics BioMEMS / µFluidics

Sensing anything, anytime, anywhere at multiple scales

RF MEMS RF MEMS

Resonators, Oscillators, Filters, Switches,...

Micro OpticsMicroOptics

MEMS Optical Microphone, Nano-Grating Based Low-G Inertial Sensor

Enabling Technologies

MEMS Design Design

MEMS Layout and Design Tools, Facilities, MEMS ...

MEMS Fabrication Technologies Process Integration & Fabrication

SUMMiT V™, Facilities, SwIFT™, Passive Waveguide, Si AlN for RF MEMS, Bulk Micromachining, Molded Tungsten, 3D Photonic Lattice...

MEMS Measurement, Characterization, and Reliability Assessment Reliability, Testing & Characterization

Reliability Testing, MEMS Measurement Tools and Methods, Operational Characterization, Services...

MEMS Packaging Integration & Packaging

MEMS Advanced Packaging, Facilities, ...

Contact MEMS at Sandia: memsinfo@sandia.gov



MEMS Image Gallery



MEMS Bibliography
MEMS Bibliography



Design Manual …
DRC Error Descriptions
Design Review Checklist



MEMS Bibliography
MEMS Brochure