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SAMPLES Design Submission Checklist

Questions related to topics such as University Alliance membership, SAMPLES contracts, MEMS tool procurement, Sandia MEMS Shortcourses, the SUMMiT V™ process as it relates to your design, or other general information inquiries should be directed to the memsinfo@sandia.gov

Answers to questions specific to MEMS tool problems encountered during the design submission process, DRC error inquiries, or other design submission problems can be obtained by contacting staff members at drt@drc.sandia.gov.

Submitting Your Design

If you are SAMPLES customer, please use the MEMS Design Submission Form

Pre-Submission Checklist

  1. Contractual agreements have been finalized and uncertainties regarding the SUMMiT V™ process, MEMS tool installation, DRC logistics and design submission procedures have been discussed with online staff members at drt@drc.sandia.gov

  2. Design Suite Tools Version 2.2.6 has been downloaded into AutoCAD version 2009 - 2012. It is understood our design submission process does not robustly support AutoCAD designs created with earlier versions.

  3. The design has been created using the MMProto SUMMiT™ V.dwt prototype file located in the 2.2.6 Design Suite Tools.

  4. The design file submitted for fabrication has been created in .dwg format, does not exceed 255 characters and complies with the DesignerInitials_DesignFileName_Revision naming convention (dll_JeffersonUniversity_rev1.dwg). Invalid characters ampersand, hyphen, period and space have not been included in the design file name.

  5. It is understood that entities drawn on CONSTRUCTION, DIMENSION, GEAR_INFORMATION, NOTES AND TEMP will not be patterned during the fabrication process. These information layers are intended for design documentation and geometrical framework.

  6. ASHADE layer and the associated blocks AVE_RENDER, AVE_GLOBAL which are created as a result of rendering a shaded image of a three dimensional wire frame or solid model have been removed from the design file.

    Step 1: Unlock ASHADE in the Layers Properties Manager

    Layer Properties Manager

    Step 2: Individually select then delete the empty blocks "AVE_RENDER" and "AVE_GLOBAL" which are created during rendering using the quick select tool and your keyboard delete key.

    Quick Select Tool

    Step 3: Type purge on the command line to open the purge text box. Highlight the blocks "AVE_RENDER" and "AVE_GLOBAL" and the text style "ASHADE". Select purge to remove these rendering remnants from the design file.

    Purge

    Step 4: Type purge on the command line to open the purge text box. Highlight the layer "ASHADE" then select purge to remove it from the design file.

    Purge


  7. Definition points which are created when dimensioning an object and stored on the layer Defpoints have been removed from the design file.

    "Defpoints" is a generated layer that cannot be purged or deleted from the layer properties manager. After your design is complete and the required layers have been defined using geometry or block definitions, execute the command WBLOCK from the command line. This command will remove all layers including "Defpoints" from the design file which do not have geometry or block definitions associated with them.

    Write Block


  8. The design includes only those layers in the prototype file unless contractual arrangements are in place to support nonstandard processing.

  9. All SUMMiT V™ SAMPLES designs have been drawn in AutoCAD using a 0.05 µm grid snap.

  10. All objects drawn on fabricated layers are composed of closed polylines, polygons, circles, lwpolylines and/ or polylines with width. Duplicate polyline points, polylines with zero area and lengths, splines, ellipses, lines and arcs are not supported by visualization tools or will not convert to GDS format properly.

  11. Entities within the design do not extend beyond the defined module boundary outlined in the prototype file. Objects extending beyond the module boundary will damage adjacent module designs and / or frame diagnostics.

  12. All blocks have been uniquely named and inserted on layer 0. No unblocked geometry has been drawn on layer 0.

  13. Block names do not exceed 255 characters and comply with the DesignerInitials_BlockName naming convention (dll_ratchet). Invalid characters ampersand, hyphen, period and space have not been included in block names.

  14. SNL library blocks included in the design have not been altered or scaled unless the newly defined block has been renamed using the DesignerInitials_SNLLibraryBlockName naming convention (dll_SNL_Diag_TRA_A00).

  15. No illegal blocks with names A$C3482…, GENTAH or GENAXEH have been generated within the drawing file.

    When the command "paste as block" is used, AutoCAD will automatically name that block using a letter / number sequence A$C3482… within the design file. When multiple design files are merged within one reticle set, Murphy´s Law states it is highly possible AutoCAD has assigned the same block name to more than one design file. When identical block names collide within a reticle set, the blocks in question will be defined by the first block inserted within the reticle set. As a basic precaution, one should never allow AutoCAD to assign block names. Rename all block names using the DesignerInitials_BlockName naming convention (dll_widget) to establish uniqueness for your design within a reticle set.

    GENTAH also known as GENAXEH, are empty blocks that are generated when a design is created in Mechanical Desk Top. These blocks cannot be purged, deleted or renamed. This type of block can only be removed by executing WBLOCK from the command line. WBLOCK will remove all layers and blocks including "GENTAH" or "GENAXEH" from the design file which do not have geometry or block definitions associated with them.

    Write Block


  16. All bond pads have been appropriately numbered and labeled on MMPOLY 0 with designators such as SIG IN, SIG OUT etc. to support testing, packaging or design discussions.

  17. All text requiring patterning and fabrication has been generated using the Text Generator tool or has been created as a block on layer 0 comprised of closed polygons on MMPOLY0.

  18. The multi line text command (MTEXT) has not been used to create text on fabricated or non fabricated layers within the design.

  19. The final design file has been submitted for Design Rule Checking (DRC) prior to uploading the design to Sandia for fabrication. The DRC log results file (see screen shot below) is included in the design submission package. Each design error and advisory should be reviewed using the aid of the DRC Error Description documentation to determine if the fabricated device could encounter lithography, undercut, stiction, interference, charge accumulation, topography or release problems. Unresolved DRC errors should be discussed with our designers and process engineers at DRT@DRC.sandia.gov.

    DRC Log


    Note: Design Rule error and advisory violations are indicators that the drawn features do not comply with standard SUMMiT V™ process definition. Advisories are often accepted by designers to satisfy design intent as in the case of several of the SNL Standard Library Components. With rare exception does a designer accept design errors without unintended device functionality adverse effects.

  20. The snl_chkent macro has been executed within AutoCAD on the command line for the MEMS design submission file. The snl_chkent log results file (see screen shot below) is included in the design submission package.

    Checkent Log



  21. The design has been purged of all unwanted items including blocks, layers, text styles, snl_chkent errors, DRC errors etc.

  22. Conducted peer design review using SUMMiT V™ Fabrication Design Review Checklist.

 

Contact MEMS at Sandia: memsinfo@sandia.gov



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