MEMS Design and Reliability Concepts Short Course

The Sandia MEMS Design and Reliability Concepts Short Course equips participants to successfully design MEMS devices to be fabricated in the SUMMiT™ Process while keeping reliability issues in mind. The course also includes discussions of analysis tools and strategies, specific device and component design, fabrication process issues related to design, and issues related to back-end processes such as release etch and packaging.

The Sandia MEMS Design and Reliability Concepts Short Course includes lunches and refreshments each day. During the structured portion, presentations and workshops guide the attendees in designing increasingly complex devices. Attendees have the opportunity to discuss design ideas or designs currently in progress.

The prerequisites are completion of the Sandia MEMS Introductory Short Course, some experience with AutoCAD software, and interest in designing MEMS devices for the SUMMiT™ Process.

The following are topics covered during the course:

• Introduction and SUMMiT V™ Process and Fabrication Concepts Review
• Review of AutoCAD Basics
• 2D Process Visualizer
• Basic MEMS Design
• 3D Modeler & Visualizer
• MEMS Design Analysis
• Standard Parts Toolbox and Design Using Standard Parts
• Reproducibility Data on SUMMiT V™ Process
• Design Rules and DRC
• Design Using All Mechanical Layers
• Dynamic MEMS Design
• MEMS Reliability Issues
• Failure Analysis
• Packaging for Reliability

The short course includes six hands-on design workshops interspersed with the presentations so that participants can immediately apply the design concepts.