Introductory Shortcourse

The Sandia MEMS Introductory Short Course provides a thorough introduction to MEMS applications, technologies, design, fabrication, characterization, and reliability. The course includes presentations and workshops. One workshop session introduces participants to SUMMiT™ Process design and layout tools (based on AutoCAD software). Lunches and refreshments are provided throughout the course. The following are topics covered during the course:

• Introduction to MEMS
• Sacrificial Surface Micromachining
• SUMMiT V™ Process Details
• Sensors and Actuators
• Advanced Concepts
• Surface Micromachining Design
• Introduction to Design Tools
• Release Processes
• Performance Analysis and Measurement Methods
• Reliability Issues in MEMS
• Microsystems Packaging