Price List

Cost Subject to Change without Notice

MEMS Courses

Sandia MEMS Introductory Short Course	$1500
Includes course CD

Sandia MEMS Design and Reliability Concepts Short Course	$2000
Includes course CD

MEMS Software Tools

Sandia 2D Process Visualizer, 3D Visualizer CD, and 3D Modeler Generator	$5000

Sandia Advanced MEMS Design Tools CD	$5000
Includes MEMS design tools and standard components library

Fabrication

SUMMIT V Agile Prototyping (100 unreleased modules)	$11,200/design Module
(shared reticule) Partnering available for qualifying organizations. Please contact memsinfo@sandia.gov for information.

HF Release & Dry - One Batch (approximately 50 modules)	$1000
Release service includes supercritical drying (CO₂)

VSAMS Coating	$400/batch (approx. 50 die)

Custom post processing

$Case by Case

MEMS Packaging

Parts designed with standard pad frames, Aluminum Metal and packaged in 24-pin or 48-pin DIP packages Double or Single SUMMiT Module

Aluminum Masks Set up Fee	$3000

___Taped-on lids (10 part minimum)	$40/die

___Hermetic sealed metal lids (10 part minimum)	$50/die

Custom packages	$Case by Case

MEMS Testing

Testing	$1500/day

Super µDriver and Amplifier Design CD	License through TEGAM

Reliability

$1500/day

Additional Service/Technical Support

Custom Design/Design Consulting	$Case by Case

Limited Production	$Case by Case

Custom Development	$Case by Case

Note: Prices are subject to change. Check this site for current pricing. As a National Laboratory, Sandia strives to ensure that all participants have equal opportunities to realize the unique benefits available through our technology programs. We must recover the actual cost of performing work for clients, but do not charge for the research and development programs that produced the technology.

Contact MEMS at Sandia: memsinfo@sandia.gov