Sandia Advanced MEMS Design Tools 2.2.3

Sandia's has updated the MEMS Design Tools Suite for university and commercial use.

The suite features include...

• Optional metal bond pads
• Compatibility with AutoCAD versions 2004-2007
• Design templates
• Component generators
• An Internet-based design rule checker
• A virtual 2D cross-section tool
• A 3D solid model generator Interfaces to FEA analysis programs

The suite's two CDs — Advanced MEMS Design Tools and MEMS Visualization Tools — can now be used with the latest version of AutoCAD. The package also includes enhancements for designing in SUMMiT™, LIGA, and user-specified technologies.

"SUMMiT V Five Level Surface Micromachining Technology Design Manual"