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SUMMiT Fabrication Process |
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For additional examples of the sophisticated micromachines that can be fabricated in SUMMiT V™, check out our Image Gallery and Movie Gallery. Participants in the SAMPLES™ Program can design modules to be fabricated in the SUMMiT V™ Process. The fabrication cost is $ 10,000 per module design, and participants will receive a minimum of 100 unreleased modules (6340 X 2820 microns) from a processing run. For more technical details regarding the SUMMiT V™ fabrication process, check the Technical Information section or contact Harold Stewart (stewarthd@sandia.gov). 
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The
five-layer Sandia Ultra-planar Multi-level MEMS Technology (SUMMiT V™)
provided through the SAMPLES™ Program offers several unique surface-micromachining
capabilities. It is the only surface-micromachining process which can
boast up to five independent layers of polysilicon. The five layers are
comprised of four "mechanical" layers, and one electrical interconnect
layer. It is also the only surface-micromachining process which offers
chemical-mechanical planarization to eliminate inter-level interference.
It features Sandia's ultra-low-stress mechanical polysilicon, and is the
only surface-micromachining process with 1-micron design rules. The five-layer
SUMMiT V™ Fabrication Process makes possible an enormous range of
advanced designs, not possible with other less advanced technologies.
Devices such as the microengine and torque conversion systems can only
be built with the SUMMiT V™ Process.
