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MEMS Bibliography

Actuators; SUMMiT V Technology

NOTE: The full technical presentations of some papers in this bibliography are available on-line. These papers have clickable links, which point to Adobe Portable Display Format (PDF) files. To view or print these files, you must have Adobe Acrobat Reader 3.0 or greater installed. You can download a free copy from Adobe's Web Site.

Simulation, Measurement, and Mitigation of Non-Ideal Thermal Microactuator Performance, Wittwer, J.W., Baker, M.S., and Howell, L.L., 2006, Sensors and Actuators, A: Physical, Vol. 128, No. 2, pp. 395-401.

Spatially Resolved Temperature Mapping of Electrothermal Actuators by Surface Raman Scattering, Kearney,S.P., Phinney,L.M. and Baker,M.S., Journal of Microelectromechanical Systems, Transactions of the IEEE and ASME, vol. 15, No. 2, pp. 314-321, April, 2006.

Techniques in the Design of Thermomechanical Microactuators, Howell, L.L., McLain, T.W., Baker, M.S., and Lott, C.D., Chapter 7, MEMS/NEMS Handbook, Techniques and Applications, Vol 4, Editor: C.T. Leondes, Springer, pp. 187-200, 2006.

Raman Thermometry of Electro-Thermal Microactuators, Kearney,S.P., Phinney,L.M, and Baker,M.S., Proceedings of the 2005 ASME International Mechanical Engineering Congress and Exposition, Orlando, Florida, November 5-11, 2005.

Final Report: Compliant Thermo-Mechanical MEMS Actuators LDRD #52553, M.S. Baker, R.A. Plass, T.J. Headley, and J.A. Walraven, Sandia report SAND2004-6635, printed December 2004. Download

High-performance surface-micromachined inchworm actuator, M. P. de Boer, D. L. Luck, W. R. Ashurst, A. D. Corwin, J. A. Walraven, and J. M. Redmond, J. Microelectromech. Syst., 13 (1) 63 (2004).

Electrothermal Actuator Reliability Studies, Plass, R., Baker, M.S. and Walraven, J.A., Proceedings of SPIE, San Jose, CA, vol. 5343, pp. 15-21, January, 2004.

Failure Analysis of Electrothermal Actuators Subjected to Electrical Overstress (EOS) and Electrostatic Discharge (ESD), Walraven, J.A., Plass, R.A., Baker, M.S. and Shaw, M.J., Proceedings from the 30th International Symposium for Testing and Failure Analysis, Worchester, MA, Nov. 14-18, 2004.

Design and Analysis of an Out­of­Plane Micro Thermal Actuator, B. P. Trease, J. J. Allen, C. C. Wong. M. S. Baker, IMECE2003_41393, International Mechanical engineering Congress and Exposition, 15-21 November, 2003, Washington, D. C.

Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems, T.M. Mayer, M.P. de Boer, N.D. Shinn, P.J. Clews, T.A. Michalske, J. Vac. Sci. Technol. B 18(5), Sep/Oct 2000.

A New Class of High Force, Low-Voltage, Compliant Actuation Systems, M. Steven Rodgers, Sridhar Kota, Joel Hetrick, Zhe Li, Brian D. Jensen, Thomas W. Krygowski, Samuel L. Miller, Stephen M. Barnes, Michael S. Burg, Presented at Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, June 4-8, 2000.

Torsional Ratcheting Actuating System, Stephen M. Barnes, Samuel L. Miller, M. Steven Rodgers, Fernando Bitsie, Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems, San Diego, California, March 27-29, 2000, pp. 273-276.

Copyright © 2000 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any Copyrighted component of this work in other works must be obtained from Computational Publications.  I Accept.

Parallel-Plate Electrostatic Dual-Mass Oscillator, Christopher W. Dyck, James J. Allen, Robert J. Huber, Presented at the SPIE Micromachining and Microfabrication Symposium, Santa Clara, California, September 20-22, 1999.

Copyright © 1999 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Micromachine Wedge Stepping Motor, James J. Allen, Heather K. Schriner, Presented at the 1998 ASME International Mechanical Engineering Congress and Exposition, Anaheim, CA, November 15-20, 1998.

Design Tools and Issues of Silicon Micromachined (MEMS) Devices, F. R. Davies, M. S. Rodgers, S. Montague, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.

Designing Microelectromechanical Systems-on-a-Chip in a 5-Level Surface Micromachine Technology, Steven Rodgers, J. J. Sniegowski, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.

Manufacturing Micro-Systems-on-a-Chip with a 5-Level Surface Micromachining Technology, J. J. Sniegowski, M. S. Rodgers, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.

Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program, H. Schriner, B. Davies, J. Sniegowski, M. S. Rodgers, J. Allen, C. Shepard, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.

Improved Polysilicon Surface-micromachined Micromirror Devices using Chemical-mechanical Polishing, Dale L. Hetherington, Jeffry J. Sniegowski, Presented at the International Symposium on Optical Science, Engineering, and Instrumentation, SPIE's 43rd Annual Meeting, San Diego, CA, July 22, 1998.

Copyright © 1998 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Applying Macro Design Tools to the Design of MEMS Accelerometers, Brady R. Davies, M. Steven Rodgers, and Stephen Montague, Proceedings of the 44th International Instrumentation Symposium, Reno, NV, May 3-7, 1998, pp. 46-55.

Designing and Operating Electrostatically Driven Microengines, M. Steven Rogers, Jeffry J. Sniegowski, Samuel Miller, Glenn F. LaVigne, Proceedings of the 44th International Instrumentation Symposium, Reno, NV, May 3-7, 1998, pp. 56-65.

Copyright © 1998 Instrument Society of America. This paper is available as an electronic reprint with permission of ISA. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. 
I Accept.

Dynamic Effects of Linkage Joints in Electrostatic Microengines, J. J. Allen, S. L. Miller, G. F. LaVigne, M. S. Rodgers, Presented at Modeling and Simulation of Microsystems 1998, Santa Clara, CA, April 6-8, 1998.

Copyright © 1998 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any Copyrighted component of this work in other works must be obtained from Computational Publications.  I Accept.

Fabricating Micro-Instruments in Surface-Micromachine Polycrystalline Silicon, J. H. Comtois, M. A. Michalicek, and C. C. Baron, (Invited Paper) 43rd International Instrumentation Symposium, Instrument Society of America, 1997, pp. 169-178.

Copyright © 1997 Instrument Society of America. This paper is available as an electronic reprint with permission of ISA. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Characterization of Electrothermal Actuators and Arrays Fabricated in a Four-Level, Planarized Surface-Micromachined Polycrystalline Silicon Process, J. H. Comtois, M. A. Michalicek, and C. C. Baron, (Invited Paper) 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 2, pp. 769-772.

Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Thin Teflon-Like Films for Eliminating Adhesion in Released Polysilicon Microstructures, B. K. Smith, J. J. Sniegowski, and G. J. LaVigne, (Invited paper) 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 1, pp. 245-248.

Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Chemical Mechanical Polishing: Enhancing the Manufacturability of MEMS, J. J. Sniegowski, (Invited paper) SPIE Micromachining and Microfabrication Process Technology, Austin, TX, Oct. 14, 1996, Vol. 2879, pp. 104-115.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Multi-level polysilicon surface-micromachining technology: applications and issues, J. J. Sniegowski, (Invited Paper) ASME 1996 International Mechanical Engineering Congress and Exposition, Proc. of the ASME Aerospace Division, November 17-22, 1996, Atlanta, GA, AD-Vol. 52, pp. 751-759.

Surface Micromachined Gear Trains Driven by an On-Chip Electrostatic Microengine, J. J. Sniegowski and E. J. Garcia, IEEE Electron Device Letters, Vol. 17, No. 7, 366, July 1996.

Copyright © 1996 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Monolithic Geared-Mechanisms Driven by a Polysilicon Surface-micromachined On-Chip Electrostatic Microengine, J. J. Sniegowski, S. M. Miller, G. F. LaVigne, M.S. Rodgers and P. J. McWhorter, Solid-State Sensor and Actuator Workshop, Hilton Head Is., South Carolina, June 2-6, 1996, pp. 178-182.

Moving the World with Surface Micromachining, J. J. Sniegowski, Solid State Technology, Feb. 1996, pp. 83-90.

Surface Micromachined Sensors and Actuators, J. J. Sniegowski, Micro-integrated Smart Material and Structures Conference (MISMSC), Society for Experimental Mechanics, Williamsburg, VA, Oct. 11-12, 1995, pp. 100-110.

Microfabricated Actuators and Their Application to Optics, J. J. Sniegowski and E. J. Garcia, Proc. SPIE Miniaturized Systems with Micro-Optics and Micromechanics, 2383, 2/7-9/95, San Jose, CA, (1995) pp. 46-64.

Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

An Application of Mechanical Leverage to Microactuation, J. J. Sniegowski and C. Smith, 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proc. TRANSDUCERS '95/Eurosensors IX, Stockholm, Sweden, June 25-29, 1995, Vol. 2, pp. 364-367 (paper 325-PB9).

Copyright © 1995 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Surface Micromachined Microengine as a Driver for Micromechanical Gears, E. J. Garcia and J. J. Sniegowski, 8th International Conference on Solid-State Sensors and Actuators, Proc. TRANSDUCERS '95, Stockholm, Sweden, June 25-29, 1995 (accepted).

Copyright © 1995 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Surface Micromachined Microengine, E. J. Garcia and J. J. Sniegowski, Sensors and Actuators A 48 (1995) 203-214. (note: rcvd Oct 5 1994, accepted Feb. 7 1995)

Late News Results on Preliminary Fabrication and Testing of a Comb-Drive-Based Microengine for Mechanism Drive Applications, E. J. Garcia and J. J. Sniegowski, '94 Solid State Sensor and Actuator Workshop, Hilton Head Is. SC, Jun. 13-16, 1994.

Friction in Surface Micromachined Microengines, S. L. Miller, J. J. Sniegowski, G. LaVigne, and P. J. McWhorter, Proc. SPIE Smart Electronics and MEMS Vol. 2722, San Diego, Feb. 28-29, 1996, p. 197-204.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Performance Tradeoffs for a Surface Micromachined Microengine, S. L. Miller, J. J. Sniegowski, G. LaVigne, and P. J. McWhorter, Proc. SPIE Micromachined Devices and Components Vol. 2882, Austin, Oct. 14-15, 1996, p. 182-191.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Application of Chemical-Mechanical Polishing to Planarization of Surface-Micromachined Devices, R. Nasby, J. Sniegowski, J. Smith, S. Montague, C. Barron, W. Eaton, P. McWhorter, D. Hetherington, C. Apblett, and J. Fleming, Proc. Solid-State Sensor and Actuator Workshop, pp. 48-53, Jun. 1996.

Micromachined Sensor and Actuator Research at Sandia's Microelectronics Development Laboratory, J. Smith, Invited Presentation, Proc. Sensors Expo Anaheim '96, pp. 119-123, April, 1996.

Monolithic Integration of Waveguide Structures with Surface-Micromachined Polysilicon Actuators, J. Smith, R. Carson, C. Sullivan, and G. McClellan, SPIE Smart Electronics and MEMS, vol. 2722, pp. 75-81, Feb. 1996.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Contact MEMS at Sandia: memsinfo@sandia.gov



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