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MEMS Bibliography

This bibliography provides a comprehensive list of our MEMS-related publications, grouped by general category. In most cases, the actual documents are also available via the embedded links.

General Reviews

Integrated Technology; Inertial Sensors

Measurement, Characterization, Modeling/ Reliability

Actuators; SUMMiT Technology

Non-Inertial Sensors

BioMEMS; Microfluidics

µOptics

MEMS Patents

Contact MEMS at Sandia: memsinfo@sandia.gov



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