Sandia National Laboratories - University Alliance UA661 Module Description

Useful information

• Characterization Equipment

Purpose

This resource is provided to the Sandia National Laboratories University Alliance Partners for educational use only.  The following devices are found on the UA05D1 and D2 Modules (die).  This initial documentation set  is a work in progress and includes information on the selected linked devices below.  Revisions of this documentation will be provided and periodically announced to the University Alliance members.

For Questions on Testing and Design of these devices - we encourage you to contact

MEMSinfo@sandia.gov

• TRA - Torsional Ratcheting Actuator with Braking System

• Linear Comb Drive MicroEngine

• Cantilever Beams

• "Pull Tab" Tensile Strength Structures

• Thermally Actuated Bimodal Latch

• Thermal Actuator with Restoring Spring

• MMPoly1,2,3 and 4 Resonators

• Etch Undercut Structures

• Nitride Etch Undercut

• Split Cross Bridge

In addition to these brief descriptions, additional detailed information can be found within the virtual reference library provided as well as through the links.  This library will become more populated in future revisions.